Mask Making

Not the kind of masks you're thinking of (unless you've also spent far too much time in a clean room in your life). I made a mask today, and I think it worked on my first try after two years of not having work in the clean room.

Mask making, at least at the University of Washington, involves putting a design into software that runs the Heidelberg direct-write lithography. We order masks, which are pieces of glass coating with a thin layer of chrome, and then a thin layer of a photoresist (AZ1512) on top. The mask writes the pattern into the resist to make it soluable in a basic solution (AZ340). After rinsing, the chrome is etched away in chrome etchant, and the remaining resist is stripped in an EKC bath.

The whole process only took a couple hours for me, and I will hopefully use the mask several times. The mask looked good, but I have no pictures (not that you'd see much anyway).